Surface tension powered self-assembly of 3-D micro-optomechanical structures
نویسندگان
چکیده
منابع مشابه
Surface Tension Powered Self-Assembly of 3-D Micro-Optomechanical Structures
A new surface micromachining process for surface tension powered self-assembly of silicon-based microstructures is described. Mechanical parts are formed from bonded silicon-oninsulator material and rotated out-of-plane by melting photoresist pads at low temperature. Simple mechanisms that allow accurate control of the final angle are introduced and used to construct fixed 45 mirrors and scanni...
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Because of the low dimensional power of its force scaling law, surface tension is appropriate for carrying out reshaping and assembly in the microstructure size domain. This paper reviews work on surface tension powered self-assembly of microstructures. The existing theoretical approaches for rotational assembly are unified. The demonstrated fabrication processes are compared. Mechanisms for ac...
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A solution technique for the dynamic analysis of asymmetric base-isolated buildings, subject to earthquake ground motion, is presented. To develop the formulation, a yield surface as a function of both shear force and torsion moment of the sliding surface with rigid perfectly plastic behavior is constituted. To achieve the objective, the yield stress is defined by the friction coefficient throu...
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A method of fabricating micromachined Corner Cube Reflectors (CCRs) with high surface flatness and accurate control of mirror angle is demonstrated. A parallel, automated three-dimensional self-assembly process is presented, using bonded silicon-on-insulator material and out-of-plane rotation powered by the surface tension of thick photoresist pads. Precise alignment is achieved by minimising t...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 1999
ISSN: 1057-7157
DOI: 10.1109/84.809060